【摘要】 在静电驱动电容式微机械陀螺传感器结构的基础上,对寄生Coriolis力进行受力分析,建立了寄生Coriolis力的等效电学模型。比较分析了理想情况下微机械陀螺的等效电学模型以及包含寄生Coriolis力的等效电学模型,结果表明,对于静电驱动电容式微机械陀螺,寄生Coriolis力并不改变有用信号的频率及相位,对其峰峰值的衰减程度小于0.2‰。更多还原

【Abstract】 A micromachined gyroscope with electrostatic driving and capacitive sensing was investigated based on mechanical analysis of Coriolis offset,and an equivalent electrical model of micromachined gyroscope including Coriolis offset was established.This model was simulated and compared with the equivalent electrical model of micromachined gyroscope under ideal conditions.Results indicated that,for micromachined gyroscope with electrostatic driving and capacitive sensing,the Coriolis offset affected neither frequency nor phase of the desired signal,but it may reduce the amplitude of desired signal within 0.2‰.更多还原