【摘要】 透射电子显微镜的聚光镜的作用是将电子枪发射的电子束汇聚于试样平面上,并调节试样平面处束的孔径角、束的电流密度和照明斑点半径,因此聚光镜的设计与加工是电镜照明系统制造的关键部分。以我国自主设计的TDX-200透射电子显微镜的聚光镜为研究对象,采用有限元结构分析软件ANSYS对其进行热应力分析计算,为该类型的透射电子显微镜设计和制造提供可靠数据。更多还原

【Abstract】 In transmission electron microscopy,the condensed lens not only has function of condensing the electron beam,but also bears the weight of electron gun of transmission electron microscopy.Especially in working conditions,much heat is released from the coils.So it is very important to calculate and analyze thermo-stress of the condensed lens.And we select the condensed lens of TDX 200 as the research object and calculate the stress-strain by the finite element software ANSYS,which will provide the data for design and manufacture of the transmission electron microscopy.更多还原