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膜片式光纤光栅压力传感器的灵敏度分析
Study on Sensitivity of Membrane-Type Fiber Bragg Grating Pressure Sensor
【摘要】 在理论推导光纤光栅压力传感器的灵敏度的基础上,采用结构增敏方法,设计并研制出了一种实用型高灵敏度的膜片式光纤光栅压力传感器,并用液压法对传感器的灵敏度进行了实验研究。实验结果表明,该高灵敏度膜片式光纤光栅压力传感器的反射波长移动量与膜片载荷(或水柱高度)成正比,其线性度达到0.9999,压力灵敏度系数为-0.023/MPa;实测压力灵敏度为0.03pm/Pa,理论压力灵敏度为0.0301pm/Pa,与实测压力灵敏度非常接近,二者的相对误差仅为0.33%。
【Abstract】 Based on theoretic deducing of sensitivity of fiber Bragg grating pressure sensor,A utility-type high-sensitivity of membrane-type fiber Bragg grating pressure sensor has been designed and developed by using structure-enhanced sensitivity technique,and the sensitivity of sensor has been experimental study by hydraulic pressure method.The results indicate that the reflect wavelength locomotive quantity of the high-sensitivity membrane-type fiber Bragg grating pressure sensor is proportional to load of film,the linearity is up to 0.9999,and that the pressure sensitivity coefficient is-0.023/MPa.The measured pressure sensitivity is 0.03pm/Pa,The theoretical pressure sensitivity,which is very approach to the measured pressure sensitivity,is about 0.0301pm/Pa,and the relative error with the measured pressure sensitivity is only 0.33%
【Key words】 FBG; pressure sensor,structure enhanced sensitivity; sensitivity;
- 【文献出处】 机电工程技术 ,Mechanical & Electrical Engineering Technology , 编辑部邮箱 ,2011年05期
- 【分类号】TP212
- 【被引频次】15
- 【下载频次】407