【摘要】 采用等离子体基氧离子注入技术对Ti6Al4V合金进行表面处理。注入电压选取-50 kV,注入剂量为4.5×1017 ions/cm2。氧离子注入后对注入样品进行不同温度的真空退火处理。真空退火后,样品表面形貌发生显著变化。随着退火温度增加,先后出现点状、条状缺陷和浅白色块状区。500℃真空退火后样品表面粗糙度变化不大,600℃真空退火后样品表面粗糙度急剧增加。真空退火导致注氧层中氧流失,并且不能在注氧层中析出结晶相。更多还原

【Abstract】 Ti6Al4V was treated by oxygen plasma based ion implantation with-50 kV and 4.5×1017 ions/cm2.Subsequent annealing in vacuum was applied to the implanted sample.The vacuum annealing leads to a large change for the surface morphology of the implanted sample.With increasing annealing temperature,dot and strip defects form first,afterwards the white areas appear at the surface of the implanted sample.After annealing at 500 ℃ in vacuum,the surface roughness has not obvious change,but the annealing at 600 ℃ results in a large increase in surface roughness.The vacuum annealing makes implanted oxygen run off the oxygen implanted layer and don’t form titanium oxide phase.更多还原