【摘要】 脉冲激光沉积法是一种制备类金刚石膜(DLC膜)的新技术。总结了脉冲激光法制备DLC膜在激光源、脉宽、沉积气氛及薄膜掺杂等方面的发展趋势。建立了飞秒脉冲激光沉积DLC膜系统,在不同的沉积条件下(如:真空、氧气氛、掺硅等)开展了实验研究,阐明了不同沉积条件对DLC膜性能的影响规律。在硅、锗红外窗口上镀制了工程实用的DLC增透保护膜,平均透过率超过90%,纳米硬度高达44 GPa,镀膜窗口通过了军标的盐雾、重摩擦等试验,满足海面等恶劣环境使用要求。更多还原

【Abstract】 Pulsed laser deposition(PLD) is a new technology for producing diamond-like carbon(DLC) films.The development trends,such as laser source,pulse-width,ambient-atmosphere and element-doping,were summarized,which were very important for DLC films by PLD.Ti:Sapphire femtosecond PLD system was built.Experiments were carried out under different conditions like vacuum,oxygen atmosphere and silicon-doping.The influence rules of these conditions on DLC films were illuminated.DLC films were deposited on silicon and germanium IR windows,with the average transmittance larger than 90% and nano hardness up to 44 GPa.The windows coated by DLC films passed salt-fog and heavy-friction experiments can be used under rigorous circumstances such as ocean.更多还原