【摘要】 通过正交试验优化了微弧氧化制备表面形貌较好、粗糙度较小的BaTiO3薄膜的工艺参数,对最优工艺参数下制备的薄膜进行了表征,并研究了溶液浓度、电流频率、电流密度和反应时间对薄膜表面形貌和表面粗糙度的影响.结果表明:在最优工艺条件下(Ba(OH)2溶液浓度0.5mol/L、电流频率100Hz、电流密度2.0 A/cm2、反应时间5 min),所得薄膜主要由四方相BaTiO3组成,其在1kHz下的介电常数为113.0;随着溶液溶度和电流频率(150Hz以下)的增加、电流密度的减小、反应时间的缩短,薄膜表面变得平整,粗糙度变小.更多还原

【Abstract】 Barium titanate film with good surface morphology and small surface roughness was prepared via micro-arc oxidation,and the corresponding preparation parameters were optimized by orthogonal test.Then,the film prepared under the optimal conditions was characterized,and the influences of solution concentration,current frequency,current density and reaction time on the surface morphology and roughness of the film were investigated.The results show that,under the optimal conditions,namely a Ba(OH)2 solution concentration of 0.5 mol/L,a current frequency of 100 Hz,a current density of 2.0 A/cm2 and a reaction duration of 5 min,the prepared film is mainly composed of tetragonal BaTiO3 and is of high dielectric constant(113.0) at 1 kHz,that the surface roughness of the film decreases with the increase of solution concentration and current frequency(less than 150 Hz) and with the decrease of current density and reaction time.更多还原