【摘要】 采用射频磁控溅射的方法制备了Ti含量不同的Ta(Ti)N涂层并研究了涂层的微观结构和性能。扫描电子显微镜(SEM)照片显示涂层结构致密无大的孔洞。XRD结果显示无Ti掺杂的涂层为面心立方结构的TaN,Ti掺杂的Ta(Ti)N涂层随着Ti掺杂量的增加TaN的衍射峰向高角度偏移,偏移的原因是形成了Ta(Ti)N固溶体。固溶体的形成使Ta(Ti)N涂层的纳米硬度明显高于TaN涂层的纳米硬度。Tafel外推结果表明在PBS溶液中,Ta(Ti)N涂层后的316L不锈钢的耐腐蚀性明显好于基体316L不锈钢的耐腐蚀性。血液相容性实验结果表明Ta(Ti)N涂层的血液相容性明显好于316L不锈钢基体的血液相容性。更多还原

【Abstract】 The Ta(Ti)N coatings with different Ti contents were deposited on the surface of 316L stainless steel(SS) by RF magnetron sputtering.The microsturcture,phase constitution,properties of the Ta(Ti)N coatings were systematically investigated.The SEM results showed that the Ta(Ti)N coatings exhibited dense structures without cavities.XRD results revealed that the Ta(Ti)N coating without Ti presented an ace lattice structure.However,the shift of all TaN peaks towarded higher angles can be observed.The structure evolution results revealed that the small amounts of Ti in the coatings substituted a part of Ta atom and the solid solution Ta(Ti)N is formed.The nanoindentation results indicated that the Ta(Ti)N coating had higher hardness than TaN coating for the forming of the solid solution Ta(Ti)N.The results of potentiodynamic polarization showed that the corrosion resistance of the 316L SS can be improved significantly because of the deposited Ta(Ti)N coatings.The platelet adhesion test results indicated that the hemocompatibility of the Ta(Ti)N coating was better than that of 316L SS.更多还原