【摘要】 通过研究互相关联的光学和工艺参数,用标量衍射理论设计了用于128×1日盲型紫外探测器的衍射微透镜阵列,其工作中心波长为400 nm,单元透镜F数为f/5,f为焦距.采用组合多层镀膜和剥离的工艺方法制备微透镜阵列,对工艺流程和制备误差进行了分析,对制备出的128×1的衍射微透镜阵列的光学性能进行测量和分析.实验结果表明,衍射微透镜阵列的衍射效率为87%.制备误差主要来自对准误差和线宽误差.紫外衍射微透镜阵列的整体性能满足了微透镜阵列与紫外焦平面阵列的单片集成要求.更多还原

【Abstract】 Diffractive microlens arrays for 128×1 solar-blind UV photodetectors were designed using scalar diffraction theory by considering the interrelated optical and process parameters.The working center wavelength is 400 nm,the lens F number is f/5.The microlens arrays were fabricated by use of combination multi-coatings and stripping technique,the practical processes and fabrication errors were discussed,and the optical characteristics of 128×1 diffractive microlens arrays were measured and analyzed.Experimental results show that the diffraction efficiency of the diffractive microlens array is 87%.The fabrication errors come from the alignment error and the line width error.The overall performance of ultraviolet diffractive microlens array can meet the monolithic integration requirements of the microlens array with the ultraviolet focal plane array.更多还原