【摘要】 本文运用力学分析方法,揭示了工程实践中的基于中心轴支撑的大口径高精度反射镜面型变化机理,通过有限元分析结果与实验结果的对比,提出了使用装调手段控制其在微小范围变形的基本方法;在对520mm口径中心轴支撑椭球面反射镜进行装调的实例中,运用该方法获得了RMS值1/50λ(λ=632.8nm)的面型精度.更多还原

【Abstract】 The article reveal the center shaft supporting large aperture mirror’s surface quality changing principle according to engineering practice and mechanical analysis.And a kind of alignment method was proposed for surface quality optimization,the finite element analysis results and experimental results was given,the comparison prove the alignment method is effective and the principle is correct.An 520 mm diameter ellipsoid mirror was alignment to RMS 1/50λ(λ=632.8 nm) accuracy of surface quality after micro deformation assembly.更多还原