【摘要】 提出了一种用于单频激光干涉仪的非线性误差被动补偿方法。利用干涉仪中波片位置的在线预置,实现干涉仪偏振态的超前调整,补偿干涉仪中由偏振分光棱镜、消偏振分光棱镜以及波片的性能和位置非理想导致的非线性误差。构建干涉仪非线性误差在线检测装置进行实验研究。结果表明,通过被动补偿方法集成的干涉仪输出信号的交直流抑制比大于500,非线性正交相移m减小至0.003 rad(0.15 nm)。通过连续24 h的稳定性测量实验可知,参数m变化幅度在0.024 rad(1.21 nm)内,极大地抑制了干涉仪的非线性误差。更多还原

【Abstract】 A passive nonlinear error compensation method is proposed for single-frequency laser interferometer.It is realized by changing the location of the wave plate in interferometer to adjust the polarization of the interferometer,which compensates the nonlinear error caused by the non-ideal performance and location of the polarized beam splitter,the depolarized beam splitter,the wave plates and other optical parts.A corresponding integrated interferometer nonlinear error on-line detection system is constructed.The experimental results show that the AC and DC output signal suppression ratio is greater than 500 and the nonlinear quadrate phase shift m is reduced to 0.003 rad(0.15 nm).Through stability measurement experiment in 24 h,m changes within the range of 0.024 rad(1.21 nm),which demonstrates the effectiveness of the method in greatly inhibiting nonlinearity.更多还原