【摘要】 针对高精度点衍射球面检测系统中金属反射介质的偏振效应,分析了不同偏振态光束在不同孔径角范围情况下所引入的斜反射波前像差。通过数值仿真,对金属反射介质所引入的斜反射相移曲线特征进行了分析,并以此为基础,提出了相应的斜反射波前像差校正方法。利用高精度球面检测中点衍射干涉仪对所提出的校正方法进行了实验验证,并给出了相关实验结果。结果表明,干涉检测系统中选择不同光束偏振态时,金属反射介质会引入不同的影响,而利用该校正方法可有效减小其斜反射波前像差,校正实验中可将波面面形偏差峰谷(PV)值和均方根(RMS)值分别由0.0452λ和0.0075λ降至0.0194λ和0.0021λ(λ为光波长)。更多还原

【Abstract】 Based on the polarization effect of metal-dielectric reflector in the point-diffraction interferometer for high-precision spherical surface testing,the oblique-reflection wavefront aberration of beams with different polarizaed states at various aperture angles is analyzed in detail.According to the numerical simulation result,the characteristic of oblique-reflection phase shift introduced by metal-dielectric reflector is studied,based on which the corresponding calibration method is presented.The experimental validation with the point-diffraction interferometer for high-precision spherical surface testing is carried out.Experimental results indicate that the metal-dielectric reflector introduces various effects on the beams with different polarized states,and the oblique-reflection wavefront aberration can be calibrated by the proposed method,with the residual error peak-valley(PV) value dropping from 0.0452λ to 0.0194λ and root mean square(RMS) value from 0.0075λ to 0.0021λ(λ is wavelength).更多还原