Ultra-precision figuring using submerged jet polishing

【摘要】 A new removal optimization method called submerged jet polishing(SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic(PV) 0.066 λ to 0.024 λ(λ = 632.8 nm) after three iterations,and the root mean square(RMS) value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.更多还原

【Abstract】 A new removal optimization method called submerged jet polishing(SJP) is reported. Experiments are conducted to obtain the removal shape. Results of SJP indicate that a Gaussian shape removal function can be obtained and that the removal rate is sensitive to variations in the standoff distance. SJP is applied to the corrective figuring of a BK7 optical glass. The flatness is improved from photovolatic(PV) 0.066 λ to 0.024 λ(λ = 632.8 nm) after three iterations,and the root mean square(RMS) value is improved from 0.013 λ to 0.00395 λ. The experimental result indicates that SJP has a capability for ultra-precision figuring and can be applied in polishing complex-shaped surfaces.更多还原