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Laser direct writing pattern structures on AgInSbTe phase change thin film

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【Author】 Aihuan Dun1,2,Jingsong Wei1,and Fuxi Gan1 1Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China 2Graduate University of Chinese Academy of Sciences,Beijing 100049,China

【机构】 Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences； Graduate University of Chinese Academy of Sciences；

【摘要】 Different pattern structures are obtained on the AgInSbTe(AIST) phase change film as induced by laser beam.Atomic force microscopy(AFM) was used to observe and analyze the different pattern structures.The AFM photos clearly show the gradually changing process of pattern structures induced by different threshold effects,such as crystallization threshold,microbump threshold,melting threshold,and ablation threshold.The analysis indicates that the AIST material is very effective in the fabrication of pattern structures and can offer relevant guidance for application of the material in the future.更多还原

【Abstract】 Different pattern structures are obtained on the AgInSbTe(AIST) phase change film as induced by laser beam.Atomic force microscopy(AFM) was used to observe and analyze the different pattern structures.The AFM photos clearly show the gradually changing process of pattern structures induced by different threshold effects,such as crystallization threshold,microbump threshold,melting threshold,and ablation threshold.The analysis indicates that the AIST material is very effective in the fabrication of pattern structures and can offer relevant guidance for application of the material in the future.更多还原

【关键词】 ablation； Atomic； melting； writing； contour； clearly； crystalline； fabrication； shaped； irradiation；

【基金】 supported by the National Natural Science Foundation of China(Nos.50772120, 60977004,and 11054001);the Shanghai Rising Star Tracking Program(No.10QH1402700);the Basic Research Program of China(No.2007CB935400)

【文献出处】 Chinese Optics Letters ,中国光学快报(英文版) , 编辑部邮箱 ,2011年08期

【分类号】TN249
【被引频次】6
【下载频次】66

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