【摘要】 为了精确检测大口径非球面面型质量,将CGH作为补偿器应用于凹非球面的离轴全息检测系统中。根据计算全息图的离轴全息检测系统检测凹非球面的基本原理,分析了离轴CGH的计算、制作过程,实现了对口径为150 mm,近轴半径为1 499.7 mm,非球面系数为—1的凹非球面镜的检测。实验结果与轮廓仪检测结果吻合得很好。更多还原

【Abstract】 Compute-generated hologram is used as a compensator in off-axis holographic detection system to test large concave aspheric surface more precisely.According to the principle of the off-axis holographic detection system using CGH.the calculation and making of CGH are analyzed.The measurement of concave aspheric surface with an aperture of 150 mm, spherical radius of 1 499.7 mm and aspheric coefficient of -1 is performed.The measurement result is coincident with the result of profilograph.更多还原