【摘要】 文章介绍了一种基于微电子机械系统(MEMS)技术的可调谐光滤波器(TOF),分析了其基本原理和光学结构,给出了合理的设计方案及所进行的实验验证。实验结果表明,该滤波器性能优良,20 dB带宽<0.65 nm,3 dB带宽<0.24 nm,整个光路的插损控制在2 dB以内。根据该方案设计的滤波器具有体积小、成本低和波长调谐范围大等特点,而且能实现窄带滤波,可以广泛用于光通信系统和传感领域。更多还原

【Abstract】 This paper presents a Micro Electro Mechanical Systems(MEMS)-based Tunable Optical Filter(TOF),analyzes its fundamental principle and optical structure and works out a rational design,which is verified in experiments.The results indicate that it is characteristic of small volume,low cost and large range of wavelength tuning.Moreover,it can realize narrowband filtering,extensively applicable in the flied of optical communication and filtering.更多还原