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物理气相沉积对化学钢化玻璃抗冲击强度的影响
Influence of Physical Vapor Deposition on Ball Impact Resistance of Chemically Strengthened Glass
【摘要】 用真空热蒸发沉积、离子束辅助沉积和磁控溅射三种方法在化学钢化玻璃上分别镀制铬薄膜和硫化锌薄膜,并对镀膜的化学钢化玻璃进行落球冲击实验,结果表明:镀膜的化学钢化玻璃的抗冲击强度变弱,不同的物理气相沉积方法对化学钢化玻璃的抗冲击强度影响不同。本文主要分析了薄膜应力和粒子束能量对化学钢化玻璃表面压应力的影响,并探讨化学钢化玻璃抗冲击强度变弱的原因,提出了解决的方法。
【Abstract】 The Cr thin films and ZnS thin films on chemically strengthened glass were prepared by vacuum vapor-deposited coating and ion beam assisted deposition and magnetron sputtering.Ball impact resistance of chemically strengthened glasses with deposited Cr and ZnS were measured.The results show that ball impact resistance of chemically strengthened glasses with deposited Cr and ZnS is smaller than that of chemically strengthened glasses.And ball impact resistance of chemically strengthened glasses with different depositing recipe is different.It is analyzed that the thin films’ residual stress and energy of particle beams have effect on the chemically strengthened glass interface stress,and discussed that chemically strengthened glass of ball impact resistance gets low,and given some advice.
【Key words】 physical vapor deposition; stress; chemically strengthened glass; glass surface;
- 【文献出处】 硅酸盐通报 ,Bulletin of the Chinese Ceramic Society , 编辑部邮箱 ,2011年01期
- 【分类号】TQ171.732
- 【被引频次】6
- 【下载频次】574