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等离子清洗处理SERS活性金岛膜表面杂质的研究
A Research on Plasma Cleaning for Removing Contaminants from SERS-active Gold Island Films Surfaces
【摘要】 采用真空蒸镀法在硅片表面形成了一层具有表面增强拉曼活性的金岛膜。拉曼光谱发现该金岛膜表面存在非晶态碳的污染物。通过比较不同清洗方法的拉曼光谱可以证明,用氧气等离子体清洗金岛膜可有效去除金表面的杂质。金岛膜的表面增强拉曼活性在清洗前后没有发生明显变化。
【Abstract】 Gold island films were prepared by vacuum deposition of gold wire on to silicon substrate.Raman spectra analysis indicated that the resulting gold island films surfaces were polluted by amorphous carbon.Oxygen plasma cleaning was used to remove surface contaminants.A comparison between the Raman spectra of different cleaning methods proved that oxygen plasma cleaning removed the amorphous carbon from gold surfaces effectively.The plasma-treated sample surfaces didn’t show significant change in SERS enhancement.
【关键词】 金岛膜;
表面增强拉曼光谱;
等离子体清洗;
除杂;
【Key words】 gold island films; SERS; plasma cleaning; removing contaminants;
【Key words】 gold island films; SERS; plasma cleaning; removing contaminants;
【基金】 国家自然科学基金(10274019,10674041)
- 【文献出处】 光散射学报 ,The Journal of Light Scattering , 编辑部邮箱 ,2011年01期
- 【分类号】O657.37
- 【下载频次】118