【摘要】 介绍一种基于滑膜阻尼的差动电容加速度传感器.该加速度传感器利用圆柱形差分电容极板间重合面积的改变来检测加速度的大小,保证输出电压与加速度之间的线性度.对加速度传感器进行结构设计和分析,介绍加速度传感器的工艺流程.测试结果表明,该加速度传感器的灵敏度较好,谐振频率与理论计算相吻合.更多还原

【Abstract】 An acceleration transducer with slide-film damping-based differential capacitor was introduced.In this transducer the acceleration was detected by the alteration of the overlapping area of a cylindrical differential capacitive plate pair and the linearity between the output voltage and acceleration was ensured.The structure of the acceleration transducer was designed and analyzed and its technological process was introduced,also.It was shown by measurement result that its sensitivity was fairly good and its measured resonant frequency was well consistent with that of theoretic calculation.更多还原