【摘要】 利用偏压增强化学气相沉积系统,以CH4、H2和NH3为反应气体,分别在沉积有钛膜和碳膜的Si衬底上制备锥形碳结构,并用扫描电子显微镜、X射线能谱仪和显微Raman光谱仪对其进行表征,结果表明所制备的样品为锥形碳氮结构。用显微Raman光谱仪对锥形碳氮结构在室温下的发光性能进行了研究,发光谱显示出中心在621,643,726 nm的发光带。根据碳氮薄膜的发光机理对锥形碳氮结构的发光性能进行了分析。更多还原

【Abstract】 Carbon cones were grown on silicon substrates by bias-enhanced chemical vapor deposition using methane,hydrogen and ammonia as the reaction gases,and the silicon substrates were pre-deposited with titanium and carbon films,respectively.The cones were characterized by scanning electron microscopy,energy dispersive X-ray and micro-Raman spectroscopy.The results indicate that the cones are CN structure.The photoluminescence of CN cones was investigated by micro-Raman spectroscopy at room temperature and the photoluminescence spectrum showed three emission bands centered at about 621,643,726 nm,respectively.According to the photoluminescence mechanism of CN films,the photoluminescence of CN cones was analyzed.更多还原