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基于空间光调制器与CCD的衍射和干涉定量实验

Quantitative optic experiments of diffraction and interference based on spatial light modulator and CCD camera

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【作者】 朱昊郭宏孙利群谭峭峰曹良才

【Author】 ZHU Hao,GUO Hong,SUN Li-qun,TAN Qiao-feng,CAO Liang-cai(State Key Laboratory of Precision Measurement Technology and Instruments,Department of Precision Instruments,Tsinghua University,Beijing 100084,China)

【机构】 清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室

【摘要】 利用空间光调制器与CCD摄像机,取代传统的光刻掩膜板及白屏,构建成新型光衍射与干涉定量实验系统,将PC机软件绘制的狭缝小孔等衍射图案传输至空间光调制器,用CCD接收其远场衍射和干涉图样,再用PC机处理图像,做定量分析.可验证狭缝和圆孔衍射公式;对形状和空间关系复杂的异形孔,也可方便地实现衍射干涉图样的观察存储与测算.

【Abstract】 Using the spatial light modulator(SLM) and CCD camera to substitute the traditional lithographic masks and white screens,a novel quantitative diffractive and interferential optics experimental system is developed.Slits,apertures and other patterns generated by plotting software of personal computer are sent to the SLM,their far field diffractive and interferential images are acquired by CCD camera,which are then processed and analyzed quantitatively by personal computer.Slits and apertures’ diffraction formulas can be proved by this method.The diffractive and interferential images of abnormal-shaped apertures which are complex distributed may also be observed,stored, measured and analyzed conveniently.

  • 【分类号】O436.1
  • 【被引频次】1
  • 【下载频次】299
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