【摘要】 硅谐振式加速度计(SOA)精度高,稳定性好,数字输出,且体积小,成本低,易于集成,是新一代的微小型加速度计,具有极佳的应用前景。介绍了SOA的结构原理和发展概况,从谐振器,微杠杆,加工工艺,改变刚度方式,激励和检测方式等几方面对SOA的关键技术进行了综述。分析了SOA的机械耦合,加工工艺误差,梁弯曲刚度非线性等三大技术难点,并提出解决方案。最后对SOA的发展趋势进行了展望。更多还原

【Abstract】 Silicon oscillating accelerometer(SOA) are micro accelerometer of the new generation with excellent prospects because of its high precision,good stability,digital output as well as small size,low cost and ease of integration.The structure,principle and development of SOA is described.The key technique of SOA is reviewed from resonator,micro-lever,processing technology,way of stiffness changing,mode of excitation and detection.Three technical difficulties,mechanical coupling,processing errors and beam bending stiffness non-linearity are analyzed along with the proposed solutions.Finally,the development trend of SOA is discussed.更多还原