【摘要】 首先用球磨法制备了BaxCo2Fe24O41铁氧体粉料,烧结后制得块体材料,然后以其为靶材,用射频磁控溅射的方法在单晶硅基片上制备了膜厚为100nm的铁氧体薄膜。实验表明,沉积态的薄膜为非晶态结构,经过高温热处理后形成了较好的磁铅石结构。研究了成分、热处理温度、氧分压对薄膜结构和磁性能的影响。通过对热处理温度和氧分压的调整,制备出性能较好的Ba3Co2Fe24O41薄膜,饱和磁化强度为46.8A.m2/kg,矫顽力为7.3 kA/m。更多还原

【Abstract】 Firstly,powders of BaxCo2Fe24O41 ferrites were prepared by ball milling method and bulk materials were prepared by sintering the powders.Then the bulk materials were used as targets for this experiment.Ba3Co2Fe24O41 ferrite films with thickness of 100 nm have been deposited on Si substrate by RF magnetron sputtering.Experiments indicated that the as-deposited films were amorphous,after annealing in air at different temperatures magnetoplumbite phase was formed.The influence of composition,annealing and partial pressure of oxygen on the phase structure and magnetic property of the films were investigated.The Ba3Co2Fe24O41 ferrite films with better magnetic properties were obtained by modulating the preparing conditions such as annealing temperature and partial pressure of oxygen.The saturation magnetization of film is 46.8A·m2/kg and the coercivity is 7.3 kA/m.更多还原