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真空电镀制备非连续合金薄膜及其在电磁屏蔽中的应用

Discontinuous Alloy Films Grown by Vacuum Electroplating for Electromagnetic Shielding

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【作者】 沈中良张曙东杨辉吴刚姚费杰杨立功

【Author】 SHEN Zhong-liang~1,ZHANG Shu-dong~1,YANG Hui~2,3,WU Gang~3,YAO Fei-jie~2,YANG Li-gong~2,3(1.Toyo plastics Co.Ltd.,Pinhu 314206,China;2.Zhejiang-California nanosystems institute,Zhejiang University,Hangzhou 310029,China;3.State key lab of silicon materials,Zhejiang University,Hangzhou 310027,China)

【机构】 东洋塑料真空涂膜厂浙江大学浙江加州国际纳米技术研究院浙江大学硅材料国家重点实验室

【摘要】 采用真空电镀工艺在塑料基底上制备了非连续合金薄膜。系统研究了沉积条件的改变对薄膜的表面形貌、微观聚集态特征、薄膜导电性能的影响,并对相应薄膜体系用于电磁屏蔽的效能进行了对比研究。发现在高能离子的参与下,沉积到塑料基底上有机涂层表面的金属原子(团)会渗入涂层内部与有机介质混合,形成非连续金属相,相应的薄膜表面也出现不同的微结构。实验表明,金属层总厚度不超过500nm时其平均电磁屏蔽性能可到50dB。该复合材料以及制备方法可应用于多种有电磁屏蔽需求的产品。

【Abstract】 Discontinuous alloy films were grown by vacuum electroplating on plastic substrate.The effects of growth conditions,such as deposition time and ionization of Ar on the morphologies,microscopic aggregation,conductivity characteristics and electromagnetic shielding efficiency of alloy films were investigated.It indicated that the presence of high-energy ions made the metallic atoms penetrated into the organic layer,forming discontinuous metallic phase.Correspondingly,varying microscopic characteristics could be observed on film surface.The results show that the average electromagnetic shielding efficiency of alloy films at a thickness no more than 500nm could be 50dB within a frequency band 1.2-2.4GHz.The complex materials and technique used in this study are applicable for the products with the requirement of electromagnetic shielding.

【基金】 浙江省重大科技专项重点资助项目(优先主题)(2007C11081)
  • 【文献出处】 材料科学与工程学报 ,Journal of Materials Science and Engineering , 编辑部邮箱 ,2011年02期
  • 【分类号】TB383.2
  • 【被引频次】5
  • 【下载频次】218
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