【摘要】 针对无机半导体气体传感器材料可修饰性差、工作温度高等缺点,开展了新型金属酞菁类有机半导体气敏材料的研究,并对敏感材料进行了表征,测试结果与化学结构和理论值一致.采用微电子工艺制备平面叉指电极,采用旋涂技术,在叉指电极上形成敏感膜,对制备的旋涂膜进行红外光谱(IR)和原子力扫描电镜(AFM)表征,AFM图像表明薄膜表面均匀、平滑和致密.按照静态法测试了薄膜对NO2气体的气敏特性,结果表明,在室温和50℃时质量浓度为6.5 mg/mL的PbPc(iso-PeO)8旋涂膜相较于CuPc(iso-PeO)8、NiPc(iso-PeO)8旋涂膜表现出对NO2气体更好的敏感性和响应恢复性.更多还原

【Abstract】 Aiming at the poor adjustment and high operating temperature of inorganic semiconductor sensor,a research of new matallophthalocyanine organic semiconductor gas-sensing materials was carried out.The senisng materials were characterized,and the result was consistent with chemistry configuration and calculational reslut.Plane fork electrode was prepared by using micro-electronic technology,and sensitive membranes were formed on fork electrode by means of spin-coating technology.The thin films were characterized by IR and AFM,and the AFM image showed that the surface of the thin film was uniform,smooth and compact.The gas sensing properties of spin-coated films are determined to NO2 by static state method,and the result showed that PbPc(iso-PeO)8 with 6.5 mg·mL-1 had better gas sensitivity and response-recovery characteristic than CuPc(iso-PeO)8 and NiPc(iso-PeO)8.更多还原