【摘要】 浆料的制备是采用丝网印刷工艺制备金属氧化物半导体气敏传感器过程中的关键。浆料由有机载体、功能相和玻璃相组成。有机载体包括溶剂和助剂,通过比较不同溶剂组分的配比和不同含量助剂的添加得出松油醇、丁基卡必醇醋酸酯和邻苯二甲酸二丁酯按质量比为6∶3∶1组成的混合溶剂及添加物的质量分数分别为:乙基纤维素6%、司班85 4%和1,4-丁内酯1%,添加使有机载体获得良好的层次挥发性和流变性。采用优化的有机载体作为溶剂,分别以纳米ZnO和硼硅酸盐玻璃为功能相和玻璃相并按94∶6的比例混合,考察了纳米ZnO的尺寸、固液相比和印刷后的流平时间对气敏浆料印刷性能的影响,试验发现针对商业纳米ZnO(100 nm),固液比例为6.5∶3.5,印刷后流平30 min为宜。更多还原

【Abstract】 Preparation of slurry is the basal and crucial process when fabricating metal oxide gas sensors using screen-printing method.Slurry composed of organic vehicle,functional phase and glass phase.Organic vehicle contains solvent and additive,optimizing organic vehicle through different ratio of solvents and additives.It was found that the optimized solvents composed of w(terpineol)=60%,w(butyl-carbitol-acetate)=30% and w(di-n-butyl phthalate)=10%.At the same time,by adding w(ethyecellulose)=6%,w(Span)=85 and w(butyrolactone 1,4)=1% into the optimized solvents can make the organic vehicle more suitable for screen-printing.Base on the optimized organic vehicle,using nano-ZnO with different grain size and borosilicate as functional phase and glass phase at the weight ratio of 94∶6,we investigate the quality of screen-printed thick films by varying the ZnO grain size,the concentration of solid-phase,the leveling time.It found that the concentration of solid-phase 6.5∶3.5,30 min leveling time is suitable for the purchased nano-ZnO(100 nm).更多还原