【摘要】 以乙酸锌为原料加水合成ZnO前驱液,利用注射超声喷雾热分解方法在玻璃衬底上成功制备ZnO薄膜。通过正交选择液体注射速度、注射量、衬底温度、退火温度为实验要素,通过XRD、SEM、可见光透过率分析优化的制备条件为:液体注射速度为0.2 mL/min,注射量为3 mL,衬底温度为450℃,退火温度为500℃。制备的ZnO薄膜透光率达到85%。新的制备薄膜装置采用注射超声雾化手段,克服其雾化不均问题。更多还原

【Abstract】 Using ZnO precursor solution,which is synthesized by zinc acetate that is acted as the raw material with water,ZnO thin films are successfully prepared on glass substrates by the self-made injection ultrasonic spray pyrolysis device.Experimental factors,including liquid injection rate,injection volume,and substrate temperature and annealing temperature,are optimized through orthogonal experiment.The XRD,SEM,and visible light transmittance analysis results indicate that the optimized preparation conditions are as follows: liquid injection rate 0.2mL/min,injection volume 3mL,substrate temperature 450℃,and annealing temperature 500℃.The transmittance of ZnO thin films prepared under optimized conditions is up to 85%.The new thin-film preparation device using the injection ultrasonic spray can overcome the problem of uneven atomization.更多还原