【摘要】 研究了Al2O3(95%)陶瓷基底的粗糙度对Ni-Cr(80/20)合金薄膜及薄膜换能元性能的影响。利用磁控溅射法在不同粗糙度的基底上制备了Ni-Cr合金薄膜。通过扫描电镜、划痕法、4探针法对薄膜的微观结构、附着性能、电性能进行了研究。根据D-最优化法测定了基底粗糙度不同的薄膜换能元爆发电压、爆发电流。结果表明:随着基底粗糙度的增大,薄膜颗粒度增大,结构缺陷增多,电阻率增大,Ni-Cr薄膜附着力变大;基底粗糙度不同的样品随着刺激量的增大,爆发时间的差别逐渐缩小,当充电电压达到37 V时其爆发时间均接近20μs.更多还原

【Abstract】 The effect of aluminum oxide(95%) substrate surface roughness on the properties of Ni-Cr alloy thin film was studied.The Ni-Cr alloy thin films were prepared on the substrates with different roughness by magnetron sputtering.The micro-structure,adhesion properties and electrical properties of the thin films were studied by scanning electron microscopy,scratch method and four-probe method.The burst voltage and burst current of thin film transducer elements with different substrate surface roughness were measured according to D-optimization method.The results show that the particle size,structural defect,resistivity and adhesion strength of the thin film increase with the increase in the substrate surface roughness.Difference among the burst time of the samples with difference substrate surface roughness gradually decreases with the increase in stimulation amount.The burst time is approximate to 20 μs at the charging voltage of 37 V.更多还原