节点文献
Porous waveguide facilitated low divergence quantum cascade laser
【摘要】 <正>A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process.In contrast to the common ridge waveguide laser,devices with a porous structure give rather better beam quality.Utilizing this porous structure as a high-order mode absorber,the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.
【Abstract】 A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process.In contrast to the common ridge waveguide laser,devices with a porous structure give rather better beam quality.Utilizing this porous structure as a high-order mode absorber,the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.
【Key words】 quantum cascade laser; ridge waveguide; porous structure; electrochemical etching;
- 【文献出处】 半导体学报 ,Journal of Semiconductors , 编辑部邮箱 ,2011年06期
- 【分类号】TN248
- 【被引频次】3
- 【下载频次】47