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Porous waveguide facilitated low divergence quantum cascade laser

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【作者】 尹雯陆全勇刘万峰张锦川王利军刘俊岐李路刘峰奇王占国

【Author】 Yin Wen,Lu Quanyong Liu Wanfeng,Zhang Jinchuan Wang Lijun,Liu Junqi Li Lu,Liu Fengqi and Wang Zhanguo Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences, Beijing 100083,China

【机构】 Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences

【摘要】 <正>A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process.In contrast to the common ridge waveguide laser,devices with a porous structure give rather better beam quality.Utilizing this porous structure as a high-order mode absorber,the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.

【Abstract】 A quantum cascade laser with a porous waveguide structure emitting at 4.5μm is reported.A branchlike porous structure filled with metal material was fabricated on both sides of the laser ridge by an electrochemical etching process.In contrast to the common ridge waveguide laser,devices with a porous structure give rather better beam quality.Utilizing this porous structure as a high-order mode absorber,the device exhibited fundamental transverse mode emission with a nearly diffraction limited far-field beam divergence angle of 4.9°.

【基金】 Project supported by the National Science Fund for Distinguished Young Scholars and other Research Projects of China(Nos60525406, 60736031,60806018,60906026,2006CB604903,2007AA03Z446,2009AA03Z403)
  • 【文献出处】 半导体学报 ,Journal of Semiconductors , 编辑部邮箱 ,2011年06期
  • 【分类号】TN248
  • 【被引频次】3
  • 【下载频次】47
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