【摘要】 本文叙述了DL-10型石英真空计的研制结果,它用Φ2×6型音叉状石英晶振作为压强传感器。该真空计测量范围是10～105 Pa,误差约10%。石英真空计是应用石英晶振的谐振阻抗与气体压强有关的性能做的真空计。DL-10型石英真空计的振荡电路中的晶振同时也是压强传感器。更多还原

【Abstract】 Model of DL-10 quartz vacuum gauge is developed.A Φ2 ×6 fork-like quartz oscillator is used as pressure sensor.The measuring range of the gauge is from 10Pa to 105Pa with an average error about 10%.The gauge developed is taking advantages of the resonance impedence of the quartz oscillator and the trait relevant to gas pressure.The crystal oscillator in the oscillating circuit of the gauge is simultaneously the pressure sensor.更多还原