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温度对Ga离子源发射特性的影响研究
Temperature Dependence of Emission Characteristics of Liquid Ga Ion Source
【摘要】 本文对自主开发研制的一种可用于纳米聚焦离子束系统的液态金属Ga离子源进行了不同温度下发射特性实验,测定了在三种引出电压下不同温度该离子源的I-T特性曲线,同时测定了在三种发射电流下离子源引出极电压和实验温度的关系曲线,并对这些曲线进行了分析。实验结果表明:随着温度升高,液态金属表面张力减小,导致发射阈值电压降低;在同一引出电压下,温度越高,发射电流越大。本文的实验结果可以为合理有效地设计液态金属离子源提供启示。
【Abstract】 The influence of temperature on the field emission characteristics of the liquid Ga ion source was experimentally studied.The temperature dependence of the emission current at three different extraction voltages:5.21,5.33 and 5.38 kV,were measured and tentatively analyzed.The results show that the temperature and the extraction voltage significantly affect the field emission characteristics of the liquid Ga ion source.For instance,as the temperature rises up,the surface tension of the liquid Ga decreases and the onset voltage of the emission also decreases;at a given extraction voltage,the emission current increases with an increase of the temperature.
【Key words】 Focused ion beam; Ga ion source; Temperature; Emission characteristics;
- 【文献出处】 真空科学与技术学报 ,Chinese Journal of Vacuum Science and Technology , 编辑部邮箱 ,2010年03期
- 【分类号】TN101
- 【下载频次】81