【摘要】 用氦热解吸谱(THDS)研究了10keV,4.0×1017cm-2剂量He+辐照(200)择优取向Al的氦热解吸行为及其与升温速率的关系。结果显示,He解吸开始于270℃附近,THDS中无干扰峰存在。He解吸行为与升温速率密切相关,其解吸峰个数及峰位随升温速率的变化而改变,且不遵循通常的一级化学反应模型,而可能是多级或一级与多级化学反应的混合模型。更多还原

【Abstract】 Helium was implanted into the high purity aluminum samples with preferred orientation of(200),under the conditions of beam energy of 10keV and a helium dosage of 4.0×1017 ions cm-2.The helium thermal desorption behavior of the He-implanted Al samples and its dependence on the heating rate were evaluated with thermal desorption spectroscopy(THDS).The results show that the on-set of He desorption is about 270℃,and no spurious peak can be observed in its THDS spectra.The heating rate significantly affects the number of THDS peaks,and the peak temperature positions,deviating from the widely accepted first-order chemical reaction model.Possible mechanisms were tentatively explained.更多还原