【摘要】 适合DWDM系统应用的高性能DFB半导体激光器是现代光通信系统中发射机的核心光电子器件,光栅的设计和制作是决定器件性能的关键因素之一。目前,基于MOCVD设备的材料外延技术趋于稳定,高速器件封装技术也已经成熟,满足DWDM需求的DFB光栅的加工渐渐成为进一步降低成本的一个瓶颈。本文利用纳米压印技术制作DFB激光器光栅。结果表明,利用纳米压印技术制作出来的DFB激光器性能不逊于用EBL直接制作出的高性能激光器,不仅可以满足DWDM系统的要求,而且还具有生产效率高、成本低的优点。更多还原

【Abstract】 Distributed Feedback Laser Diodes (DFB LD) which satisfy the requirement for DWDM system is a key component for fi ber communication industry. Now technologies of LD material epitaxial growth and package have been well developed in China, however, to manufacture the diffraction gratings which satisfy the DWDM request is still a challenge, and it is become a bottle-neck for further cost reduction. In this work, nanoimprint was used to fabricate DFB laser diode. Our result shows, the performance of DFB LD manufactured by nanoimprint is as good as that manufactured by EBL, but nanoimprint provides the advantage of high yield and low cost.更多还原