【摘要】 实际工程勘探中传感器通称检波器,常规的加速度和速度型传感器的检测量是静态参数,而石油勘探等领域检测的是动态参数,也就是频率和波形。MEMS检波器主要动态参数有:频率响应也称频率范围、失真系数、动态范围。本文主要研究MEMS检波器动态参数及测试方法,通过对地震勘探MEMS检波器进行动态性能分析,介绍频率范围、失真度系数、动态范围的测试方法,实际的测量结果证明了测试方法的正确性和可行性。更多还原

【Abstract】 In actual project exploration sensor generic term detector,the conventional acceleration and the speed sensor’s examination quantity is the static parameter,but domain examinations petroleum prospecting is the dynamic parameter,is also the frequency and the profile.This paper mainly researchedthe dynamic parameter and test method of MEMS accelerometer.Through the dynamic analysis of MEMS accelerometer,it introduced these test methods of the frequency range,the distortion factor,the dynamic range.The actual test results prove the correctness and feasibility.更多还原