【摘要】 基于微细电火花加工的要求,对微细电火花成形加工设备中的关键技术进行研究,成功研制了一套高精度的微细放电加工设备产品,包括一台微细电火花加工机床和一台精密脉冲电源。优化机床关键零/部件的结构后,机床的变形小,运动精度高;电源放电稳定,控制精确。经加工试验表明,该设备加工效果较好,加工精度和稳定性较高,加工出的窄槽工件的尺寸精度可达到5μm,加工直径为300μm的小孔,其圆度误差达到3μm,可满足微细电火花加工的要求。更多还原

【Abstract】 The key technologies of the micro EDM(Electrical Discharge Machining)equipment are researched based on the requirements of micro EDM.A set of micro EDM equipment is developed successfully,including a precision micro EDM machine tool and a pulse power supply.The structures of some key parts of the tool are designed optimally,so that it has a very small deformation and a high motion precision.The power supply works stably,with a good performance of discharge and control.Through machining experiments,good machining effects are obtained stably:the dimension error of the micro slot is 5μm and the roundness error of the micro hole(whose diameter is 300μm)is below 3μm.It proves that the requirements of micro EDM will be met well with this type of equipment.更多还原