【摘要】 主要论述了一种高精度的原子力显微镜AFM.IPC-208B型机在分子形态学方面的应用研究.以磁控溅射获得的TiN薄膜为例,从原子力显微镜测得的三维图上探析该TiN薄膜的优先生长面及其在优先生长面上的原子排布.实验不仅鉴定了测试材料的微观形态,也充分肯定了该原子力显微镜原子量级的精度及其在微观结构领域的潜在发展,为该机应用于微加工领域奠定了基础.更多还原

【Abstract】 This paper describes the study about the application of high-resolution atomic force microscopy (AFM.IPC-208B) in molecular morphology. With the TiN thin film prepared by magnetron sputtering method as an example,a three-dimension image is obtained by AFM.IPC-208B,and the preferential growing face and relevant atom arrangement of the TiN film are discussed. This experiment not only identifies the micro-structures of the materials,but also affirms the application potential of AFM.IPC-208B in micro-structure field and its precision of the atomic level.更多还原