【摘要】 利用有限元软件Ansys对热释电薄膜红外探测器进行热分析,通过建立不同结构的热释电薄膜红外探测器的二维模型,得到不同结构的探测器晶片内的温度分布。对探测器吸收层和热释电层对温度场的影响进行分析。结果表明吸收层的厚度对探测器的热响应度的影响可以忽略,吸收层的宽度和热释电层的厚度对探测器的热响应度有一定影响。更多还原

【Abstract】 Thermal analysis of pyroelectric thin film infrared detector are performed through the establishment of different structures of the pyroelectric thin film infrared detector two-dimensional model by use of finite element software Ansys,a different temperature distribution of detectors is obtained.The influence of the detector absorption layer and pyroelectric layer on the temperature distribution are analyzed.The results showed that the influence of the thickness of absorbing layer of the thermal response of the detector degree can be ignored,absorbing layer width and the thickness of the pyroelectric layer of the thermal response of the detectors have a certain degree of influence.更多还原