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CVD制备各向同性热解炭的微观结构表征及沉积机制研究

Microstructure characterization and deposition mechanism of isotropic pyrocarbon prepared by CVD

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【作者】 曹伟李克智张东生李贺军

【Author】 CAO Wei,LI Ke-zhi,ZHANG Dong-sheng,LI He-jun (State Key Laboratory of Solidification Processing,Northwestern Polytechnical University,Xi’an 710072,China)

【机构】 西北工业大学凝固技术国家重点实验室

【摘要】 利用化学气相沉积设备及自行设计的沉积室,以高纯石墨为沉积基体,天然气为前驱体,沉积温度1200℃,在不同气体流量下(0.10,0.15,0.20m3/h)制备出了各向同性热解炭块体材料。利用XRD、Raman、SEM、TEM分析手段对材料的微观结构进行了研究。结果表明:各向同性热解炭由粒径为1.5~2.5μm的颗粒组成;热解炭微晶的Lc和La随着气体流量的增加而增大;TEM中选区电子衍射图谱中d002环为圆环,取向角为180°,定量地揭示制备的热解炭为各向同性。

【Abstract】 The block material of isotropic pyrocarbon was fabricated with high-purity graphite as deposition substrate and natural gas as precursor via thermal gradient chemical vapor deposition equipment and self designed deposition chamber at the deposition temperature of 1 200 ℃ under different gas flow rate (0.10,0.15,0.20 m3/h) .The microstructure of the products was characterized by XRD,Raman,SEM and TEM.The results showed that the obtained isotropic pyrocarbon was composed of pyrocarbon particles with size of 1.5 ~ 2.0 μm.The Lc and La of pyrocarbon domain increased with the increasing gas flow rate.In addition,the selected area electron diffraction pattern was a ring,which means that the orientation angle was 180°,indicating the product is isotropic pyrolytic carbon quantitatively.

【基金】 国家自然科学基金资助项目(50972120)
  • 【分类号】TB332
  • 【被引频次】8
  • 【下载频次】234
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