【摘要】 为研究氧化钇掺杂强化在薄膜中的应用,通过双靶磁控共溅射方法,制备了氧化钇弥散铁薄膜,利用X射线衍射仪、X射线荧光光谱仪、扫描电子显微镜和纳米压痕仪表征其结构、成分、形貌和纳米硬度.采用真空封管退火技术对薄膜进行热退火处理.实验结果表明,成功制备的铁基薄膜钇、氧元素弥散程度较好,在500℃真空退火处理后,铁薄膜的纳米硬度显著提高;随着氧化钇掺杂量的增多,纳米硬度增长率提高.该真空热处理方法为改善氧化物弥散强化合金的力学性能提供了借鉴.更多还原

【Abstract】 In order to investigate the yttria dispersed strength effect in thin films,double-target magnetron sputtering was carried out to prepare the yttria dispersed ferrum films.Crystal structure,composition,thickness and nano hardness were examined by X-ray diffraction,X-ray fluorescence,scanning electron microscope and nanoindenter.The films were annealed at enhancing temperature in a quartz tube after being vacuumed.Experimental results indicate that the nano hardness of ferrum films was enhanced significantly after 500 ℃ vacuum annealing,and the enhancing rate increased with the doping rate of yttria. This may provide reference for improving the mechanical property of ODS alloy.更多还原