【摘要】 将椭圆偏振测量法(椭偏法)的电磁频谱从原来可见光、红外波段拓展到毫米波段,对毫米波椭偏法测量原理进行理论分析,使用已构建的实验装置进行测量.通过对测量结果的分析,选择合适的入射角,经过大量测试,计算出被测介质材料的复介电常数.更多还原

【Abstract】 The electromagnetic frequency band of ellipsometry is extended from visible light and infrared band to millimeter-wave band.We analyze the measurement principle of ellipsometry in millimeter-wave band,and carry out experiments using a self-built measurement apparatus.From the measured results,an appropriate incident angle is chosen.We obtain complex permittivity of materials based on a large amount of measured data.更多还原