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非掺半绝缘InP材料的电子辐照缺陷研究

Study of electron irradiation-induced defects in undoped semi-insulating InP

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【作者】 陈燕邓爱红赵有文张英杰余鑫祥喻菁龙娟娟周宇璐张丽然

【Author】 CHEN Yan~1 ,DENG Ai-Hong~1 ,ZHAO You-Wen~2 ,ZHANG Ying-Jie~1 ,YU Xin-Xiang~1, YU Jing~1 ,LONG Juan-Juan, ZHOU Yu-Lu~1 ,ZHANG Li-Ran~1 ((1.Department of Physics, College of Physical Science and Technolog, Sichuan University, Chengdu 610065, China; 2.Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China)

【机构】 四川大学物理科学与技术学院物理系中国科学院半导体研究所

【摘要】 本文针对磷化铁(FeP2)气氛下高温退火非掺杂半绝缘磷化铟(IP SI-InP)材料,应用正电子寿命谱及热激电流谱学技术,研究了该材料在电子辐照前后的缺陷情况.研究发现,该材料经电子辐照后缺陷浓度在增大,且形成了复合体的缺陷结构.电子辐照后的正电子湮没平均寿命增加了18 ps,对应的热激电流谱(TSC)也出现了相应的缺陷峰.本文还对缺陷的特性、影响材料的性能等进行了简要的论述.

【Abstract】 The positron annihilation lifetime spectroscopy (PAL) and thermally stimulated current spectroscopy (TSC) have been employed to study defects before and after electron irradiation in InP which has undergone a high-temperature annealing in iron phosphide ambience. It is found that the concentration of defects in SI-InP after electron irradiation increases and the complex defects are formed as well. The positron mean lifetimeτ_m increases about 18ps and more defect peaks are also found in the TSC after irradiation. The characterization of defects and the influence of defects on material property are discussed simply in this paper.

【基金】 国家自然科学基金(10775102)
  • 【文献出处】 四川大学学报(自然科学版) ,Journal of Sichuan University(Natural Science Edition) , 编辑部邮箱 ,2010年05期
  • 【分类号】O483
  • 【被引频次】1
  • 【下载频次】37
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