【摘要】 本文系统研究了沉积温度、压力、Zn/H2S、以及衬底表面粗糙度对起拱的影响。实验表明,适当的提高沉积温度(650℃)和降低沉积压力(1.5×104Pa)有利于抑制沉积起拱;当Zn/H2S<1时起拱减弱,但透过率下降,可在沉积的初期采用低的Zn/H2S抑制起拱;由于表面阴影和钉扎效应,相对粗糙的衬底表面有更好的抑制起拱效果。更多还原

【Abstract】 In this article,effect of deposition temperature,deposition pressure,Zn/H2S ratio and surface roughness of substrate on bowing is discussed.Experimental results show that an appropriate increasing of deposition temperature(650 ℃) and decreasing of the deposition pressure(1.5×104 Pa) can suppress bowing;when Zn/H2S <1 bowing is reduced,but the transmission is dropped;low Zn/H2S ratio can be used in the initial deposition to inhibit bowing;Due to surface shadow and pinning effect,a relatively rough surface of the substrate inhibits bowing better.更多还原