【摘要】 为满足小型光纤陀螺对光学器件小体积的要求,对铌酸锂多功能集成光学小型化器件的结构做了分析和优化设计。采用BPM软件分析了Y形分支波导的S形波导损耗与弯曲长度及折射率差的关系。通过调整退火质子交换的工艺参数,增加了波导对光的束缚能力;降低了小型化芯片上S形波导的弯曲损耗;去掉了原有Y形波导的输出端直波导,直接由S形弯曲波导引至输出端,在更短的芯片上得到了更长的弯曲过渡区。设计制作的芯片长度由常规的20 mm减至12.5 mm,封装后的器件长度减小到20 mm,为目前同类常规器件尺寸的2/3。设计制作的器件插入损耗典型值小于2.5 dB,全温损耗变化量小于0.2 dB。更多还原

【Abstract】 In order to meet the demand of mini fiber optical gyro for pint-sized devices,the structure of a mini LiNbO3 multi-function integrated optical device(MIOD) is analyzed and optimized.The loss induced by the curvature of S-bend waveguide and the refractive index difference between waveguide and substrate are simulated by beam propagation method software.The bend loss of S-bend waveguide is decreased by adjusting the parameters of annealed proton exchange.Compared with conventional design,longer bend transition section occupying smaller area is realized by replacing the straight output waveguide with S-bend waveguide directly.The chip length is decreased from 20.0 to 12.5 mm,and the package length is 20.0 mm,which is 2/3 of conventional devices.The typical insertion loss of the mini MIOD is less than 2.5 dB and the loss change from-55 to 85 ℃ is less than 0.2 dB.更多还原