【摘要】 针对纳秒激光微加工的具体要求,设计了一种压电陶瓷的微位移工作台控制系统,它是由压电陶瓷、柔性铰链机构和DSP控制系统组成.基于TMS320VC33的DSP作为控制中心,主要用于对采集到的位移信号进行处理,通过PID算法控制微动平台的移动距离.将该微位移平台安装在纳秒激光微加工机上,与原系统配合进行加工,可以有效改善微结构加工的效果.更多还原

【Abstract】 A PZT micro-displacement stage controlling system which is consist of piezoelectric ceramics,flexible hinge bodies and digital signal processor is designed to meet the specific requirements of nano-second laser micro-machining DSP as the control center can analyze the collected signal and control the stage movement by PID control algorithm.It can improve the machining result of micro-structure when attached to nano-second laser micro-machining system.更多还原