【摘要】 微电子机械系统中的微构件如定子、转子,结构尺寸微小,一般在数百微米量级。制造微构件的材料主要是硅,硅具有优良的机械性能,能够满足微结构对材料力学性能的要求。机械(力学)理论基础如弹性体基本方程、运动学方程、动力学方程、弹性梁基本方程、振动理论等对微构件依然适用。笔者对一种新型微电机的驱动机理进行了研究。基于振动学理论,建立了微机械构件的振动数学模型,计算了自由振动固有频率以及推导出激励下的振动方程,并在此基础上进行了运动学和动力学分析。更多还原

【Abstract】 Micro components such as stator and rotor in a micro-electro-mechanical system have micro dimension in the order of hundreds of μm. Micro components are made of silicon; the natural mechanical properties of silicon can satisfy the needs of microstructure. Mechanical theories such as basic elastic equation,kinematic equation,dynam-ic equation,elastic beam equation and vibration theory were applicable to microstructure. An investigation of the driving mechanism of a new micromotor is presented in this paper. Based on the theory of vibration,a mathematical model of a micro-vibrator is developed to calculate the vibrator intrinsic frequencies,and excited vibration equations is deduced,the kinematic and dynamic analysis of the micro-vibrator is carried out.更多还原