【摘要】 超精密加工技术是机械制造业中最重要的部分,基于压电陶瓷的微位移机构是近年来发展起来的一种新型微位移机构,设计了基于压电陶瓷为驱动的,以弹性铰链为支撑的微进给平台。并进行了大量的试验,从中得出适于应用的线性电压-位移曲线。采用不同的升降压步长对平台进行驱动,改善了电压-位移的迟滞度。更多还原

【Abstract】 The ultraprecision processing technology is the most important part in machine manufac-turing.The micro-feeding table is driven by Piezoelectric ceramic and supported by flexible hinges.Many experiments are carried out on it.As a result,the linear curve of voltage-displacement is got which is suit-able for application.The micro-feeding table is driven with different steps of ascending voltage and de-pressive voltage.So the hysteresis degree of voltage-displacement is proved.更多还原