【摘要】 利用非对称双极脉冲磁控溅射制备了不用Co-La掺杂量的Ti-Co-La-N纳米复合薄膜。分别用扫描电子显微镜、X射线衍射、纳米压痕仪、划痕仪以及摩擦磨损仪研究了薄膜的表面形貌、结合力、显微硬度和摩擦学性能。结果表明:复合薄膜主要有TiN相、Co2N相和LaN相组成;复合膜的纤维硬度达到14.61GPa,低于TiN的显微硬度;复合薄膜的显微硬度和结合力都随着Co-La掺杂量的增加而降低;在高速钢基体上复合薄膜的摩擦系数达到了0.6。更多还原

【Abstract】 Ti-Co-La-N nano-composite films with different Co-La doping amount were deposited by the asymmetric bipolar pulsed reactive magnetron sputtering.The microstructure,morphology,adhesion,microhardness and tribological properties of the films were investigated by means of scanning electron microscopy(SEM),X-ray diffraction(XRD),nano-indentation,scratching test,friction and wear testing.The results show that phase composition of Ti-Co-La-N films are TiN,Co2 N and LaN.The microhardness of 14.61 GPa of Ti-Co-La-N film is lower than that of TiN.Furthermore,microhardness and adhesion of the composite film decline apparently as the increasing of Co /La doping amount.The friction coefficient is about 0.6 of Ti-Co-La-N nano-film on high-speed steel substrate.更多还原