【摘要】 稀土元素铒离子在光通信技术的发展中具有非常重要的作用.通过离子注入的方法把铒离子掺杂到KTiOPO4晶体,采用卢瑟福背散射技术分析了铒离子在注入晶体中的射程分布;对注入的KTiOPO4晶体进行退火处理,分析发现铒离子在KTiOPO4晶体中退火后的深度分布不再是高斯分布,是两个峰的分布.研究结果对铒离子注入KTiOPO4后的晶格缺陷、注入损伤分布等提供了重要的数据参考和理论依据.更多还原

【Abstract】 Erbium ions play a very important role in optical telecommunication developing.The erbium ions were doped into KTiOPO4 crystals by ion implantation.The Rutherford backscattering technique was used to analyze the depth profile of erbium ions in the KTiOPO4 crystals.The erbium doped KTiOPO4 crystals were annealed.The depth profile of erbium ions in annealed KTiOPO4 crystals were no longer Gaussian distributions,the two peaks is distributed.The results provide important information for the lattice defects and damage distribution.更多还原