【摘要】 采用射频磁控溅射方法,分别利用六方氮化硼(h-BN)、硼(B)和石墨(C)靶,在氩气和氮气的氛围中,沉积B-C-N薄膜.傅里叶变换红外光谱(FTIR)分析表明:在1200～1800cm-1和1000～1750cm-1处出现了较宽的吸收峰;在2200cm-1处出现了CN键的特征吸收峰.表明在沉积的薄膜中,C原子与N原子相结合.分别溅射C和h-BN靶,红外光谱分析表明,B—C键在1100cm-1处未产生吸收峰,即利用h-BN和C靶沉积的B-C-N薄膜倾向于相分离,利用B和C靶沉积的B-C-N薄膜中的原子实现了原子量级的化合.更多还原

【Abstract】 Boron-carbon-nitrogen (B-C-N) films were deposited by means of radio frequency (RF) magnetron sputtering from different targets,which were hexagonal boron nitride,boron and graphite targets in the atmosphere of nitrogen and argon. The results of FTIR spectra indicate that there were two wide absorption bands at 1 200~1 800 cm-1 and 1 000~1 750 cm-1 separately,and there existed characteristic absorption peak of NC bond at 2 200 cm-1. That is to say,C atom and N atom were combined in the deposited films. Graphite and h-BN targets were sputtered respectively,the results of FTIR spectra reveal that the absorption at 1 100 cm-1 was not due to the stretching B—C bond,B-C-N films were deposited from h-BN and C targets inclined to phase separation,and there was hybridization of atomic level in the deposited B-C-N films via B and C targets.更多还原