【摘要】 超精密加工技术是机械制造业中最重要的部分,基于压电陶瓷的微位移机构是近年来发展起来的一种新型微位移机构。设计以压电陶瓷为驱动的、以弹性铰链为支撑的微进给平台,并进行大量的试验,采用不同的升降压步长对平台进行驱动。结果表明采用合适的升降压步长,可改善压电陶瓷的电压-位移的迟滞度,从而得到实用的电压-位移曲线。更多还原

【Abstract】 The ultraprecision processing technology is the most important part in machine manufacturing.Micro-displacement mechanism based on piezoelectric ceramic is a new type of micro-displacement mechanism which develops in recent years.The micro-feeding table driven by piezoelectric ceramic and supported by flexible hinges was designed.Many experiments that used different steps of ascending voltage to drive the table were carried out.The experimental results show that hysteresis degree of voltage-displacement of piezoelectric ceramic is proved using appropriate step and the curve of voltage-displacement is gotten which is suitable for application.更多还原