【摘要】 利用角差法原理设计了一种集高精度测角仪与五棱镜于一体的面形检测系统,实现了大口径平面镜不同姿态下的面形测试。系统主要由光学系统、三维运动平台、图像处理系统和面形数据绘制与管理等组成,突破常规"以大测大"的高成本检测方法。实验结果表明,水平方向上的均方根误差(RMS)为0.03μm,垂直方向上的RMS为0.07μm,全面形的RMS为0.06μm,能满足检测需要。更多还原

【Abstract】 The method of angle difference testing is used to measure the topography of large flat mirror,the topography would be evaluated by measuring angle change of every normal point on the mirror.The testing method for the topography of high precision large flat mirror in different attitude is presented.The topography is directly tested and the measurement needs no external references,the cost is inexpensive.The system is composed of image acquisition system and image processing system.The experimental results show that RMS(root-mean-square error) of horizontal direction is 0.03 μm;RMS of vertical direction is 0.07 μm,RMS of topography is 0.06 μm.更多还原